Robert S. Chau is an Intel Senior Fellow and Director of Transistor Research and Nanotechnology in Intel's Technology and Manufacturing Group. Chau is responsible for directing research and development in advanced transistors and gate dielectrics, process modules and technologies, and silicon integrated processes for microprocessor applications. He is also responsible for leading research efforts in emerging nanotechnology for future nanoelectronics applications.
Chau joined Intel in 1989, became an Intel Fellow in 2000 and an Intel Senior Fellow in 2005. During his career at Intel he developed nine generations of Intel gate dielectrics along with many transistor innovations and process technologies used in various Intel manufacturing processes and microprocessor products. He also introduced many new process modules and novel device nanotechnologies for Intel's future logic processes.
Chau frequently presents technical papers in international technical conferences and workshops, serves as a panelist on international technical panels, and gives technical seminars and lectures to universities.
Chau received his bachelor's and master's degrees and Ph.D. in electrical engineering from The Ohio State University. He holds more than 75 United States patents, has received six Intel Achievement Awards and 13 Intel Logic Technology Development Division Recognition Awards. He was recognized by IndustryWeek in 2003 as one of the 16 "R&D Stars" in the United States who continue to push the boundaries of technical and scientific achievement. Chau has been elected an IEEE Fellow for contributions to the research and development of gate dielectric and transistor technologies for microprocessors.