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Dr. Glavish is widely recognized as a world authority in the design and manufacture of beam lines and radio frequency (RF) accelerators for ion implanters. He was the lead designer and inventor of theRF accelerator used in the high-energy Axcelis implanter. This has been the highest performance and preferred high-energy implanter in the industry with over 300 machines in use worldwide. He is the designer and inventor of fast magnetic scanning (Mag-Scan) beam lines used in the Nissin Exceed and the Applied Materials’ SWIFT 200 and 300 mm serial ion implanters, and in the Ibis 200mm and 300mm high current batch oxygen implanters used for producing SIMOX wafers. His company, Zimec, Inc., continues to design implanter beam lines, and assumes overall responsibility for the design and manufacture of prototype beam lines, as well as the Nissin Exceed and Ibis SIMOX production beam lines. | 