Dr. Cerrina is an IEEE, APS and OSA Fellow, recipient of the SRC Aristotle award, and the director of the Center for Nano Technology. His research interests are in the area of semiconductor processing and device fabrication, in particular lithography, and X-ray optics and technology. This research has a strong applied content and is currently focused on manufacturing technologies such as post-optical lithographies. More specifically, he is researching the application of X-rays to lithography for semiconductor manufacturing and to microscopy for materials and biological science. His activities include not only work with synchrotron X-rays, but also metrology, electron beam and extreme UV lithography (EUVL), and atomic force microscopy. He also focuses on the computer modeling of optical systems (X-ray optics) and of semiconductor lithography, where his group has developed codes that are now worldwide standards. Recently Dr. Cerrina has become interested in the application of microfabrication techniques to biological problems and has developed a novel method for the rapid synthesis of DNA microarray chips. This technique is being commercialized. Dr. Cerrina has published over 200 papers and holds several patents. He earned his Ph.D. in Physics from the University of Rome. |